To prevent stagnant water from forming in the pipelines, the system is designed as a circulating pipeline network, featuring both ultrapure water supply and return lines to ensure continuous water flow and maintain water quality.
To avoid bacterial growth, particle deposition, and contamination of ultrapure water quality caused by leachables from the piping, the flow rates are designed as follows: Main pipeline: 1.5–3 m/s, Branch pipeline: 1–2 m/s.
The system’s total water supply volume consists of the designed water usage plus the recirculated water volume, with recirculation accounting for 30–50% of the designed usage.